3 SerialNumber=160907-03
\r
7 ImageName=beads-std-_i015.tif
\r
8 Directory=D:\HITACHI\2019\20190505\
\r
15 AcceleratingVoltage=3000 Volt
\r
16 DecelerationVoltage=0 Volt
\r
18 WorkingDistance=19200 um
\r
19 EmissionCurrent=106000 nA
\r
29 CalibrationScanSpeed=25
\r
32 ScreenMode=Full Screen
\r
36 Condition=Vacc=3kV Mag=x5.00k WD=19.2mm
\r
37 DataDisplayCombine=1
\r
39 StagePositionX=20000000
\r
40 StagePositionY=20000000
\r
42 StagePositionZ=50000000
\r